Pirani Inverted Magnetron Gauge

Full Range Gauge that Provides Two Measuring Technologies in a Single Package by Agilent

Agilent FRG-700

This gauge is a full range gauge that provides two measuring technologies in a single, compact and economical package to measure process and base pressure from 5 x 10e-9 mbar to atmosphere (3.8 x 10e-9 Torr to atmosphere). The single, compact unit with one logarithmic analog output signal, significantly reduces the complexity of installation, setup and integration. The benefits are reduced cost and a marked reduction in valuable space requirements. The FRG-702 is the all-metal version of the FRG-700, incorporating a metal-sealed feedthrough. It can be operated at higher temperatures (max. 150º C at flange) than the FRG-700 (max. 55º C at flange).

features and benefits

5 x 10e-9 mbar to atmosphere (3.8 x 10e-9 Torr to atmosphere)
one logarithmic analog output 0-10vdc
Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
Wide measurement range from 5 x 10e-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties
Easy to clean