Pirani Vacuum Gauge
10-5 Torr to Atmosphere Pressure/Vacuum Gauges with MEMS-based Micro Pirani™ by MKS
925 Micro Pirani™
vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze-drying:
features and benefits
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General vacuum pressure measurement
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Foreline and roughing pressure measurement
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Gas backfilling measurement and control
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Mass spectrometer control
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Activation of UHV gauges
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System process control (interlocks, valves, pumps)
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Control system pressure



901P Micro Pirani™
Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
features and benefits
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Absolute pressure measurement from 1,000 to 10-5 Torr
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3-sensor functionality in a single transducer for a wide measurement range
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Analog, RS232, RS485, & EtherCAT® versions
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Optional integrated touch-screen display available for local pressure indication
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Fast, accurate and repeatable pressure measurements reduces process cycle time
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Three optional set points with fast response time for reliable process control
Micro Pirani™ is a registered trademark of MKS Instruments