Pirani Vacuum Gauge

10-5 Torr to Atmosphere Pressure/Vacuum Gauges with MEMS-based Micro Pirani™ by MKS

925 Micro Pirani™

vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze-drying:

features and benefits

General vacuum pressure measurement
Foreline and roughing pressure measurement
Gas backfilling measurement and control
Mass spectrometer control
Activation of UHV gauges
System process control (interlocks, valves, pumps)
Control system pressure

901P Micro Pirani™

Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.

features and benefits

Absolute pressure measurement from 1,000 to 10-5 Torr
3-sensor functionality in a single transducer for a wide measurement range
Analog, RS232, RS485, & EtherCAT® versions
Optional integrated touch-screen display available for local pressure indication
Fast, accurate and repeatable pressure measurements reduces process cycle time
Three optional set points with fast response time for reliable process control

Micro Pirani™ is a registered trademark of MKS Instruments